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Search for "process integration" in Full Text gives 3 result(s) in Beilstein Journal of Nanotechnology.

Integration of sharp silicon nitride tips into high-speed SU8 cantilevers in a batch fabrication process

  • Nahid Hosseini,
  • Matthias Neuenschwander,
  • Oliver Peric,
  • Santiago H. Andany,
  • Jonathan D. Adams and
  • Georg E. Fantner

Beilstein J. Nanotechnol. 2019, 10, 2357–2363, doi:10.3762/bjnano.10.226

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Published 29 Nov 2019

Review of advanced sensor devices employing nanoarchitectonics concepts

  • Katsuhiko Ariga,
  • Tatsuyuki Makita,
  • Masato Ito,
  • Taizo Mori,
  • Shun Watanabe and
  • Jun Takeya

Beilstein J. Nanotechnol. 2019, 10, 2014–2030, doi:10.3762/bjnano.10.198

Graphical Abstract
  • be process integration of top down microfabrication and bottom up self-organization to bridge materials and systems over a wide scale range. To combine all of these techniques and functional materials, the concept of nanoarchitectonics becomes a crucial bridge in this roadmap. Outline of the
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Review
Published 16 Oct 2019

The integration of graphene into microelectronic devices

  • Guenther Ruhl,
  • Sebastian Wittmann,
  • Matthias Koenig and
  • Daniel Neumaier

Beilstein J. Nanotechnol. 2017, 8, 1056–1064, doi:10.3762/bjnano.8.107

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  • devices. Generally speaking the crucial issues for graphene integration are identified today and the corresponding research tasks can be clearly defined. Keywords: contacts; deposition; encapsulation; graphene; process integration; Introduction Since the discovery of the electronic properties of
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Review
Published 15 May 2017
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